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Surface characterization in fabrication environments using angle resolved light scattering: From roughness and defect analysis to in-situ coating inspection

Year: 2024

Type: article

Abstract: The performance of an optical component or surface might quicky be limited by light scattering induced by the surface and coating roughness, as well as imperfections and contaminations. On the other hand, the scattered light contains valuable information about its source, which makes scattering based techniques powerful characterization tools for these important features. A major advantage is the fast, robust, and contact free measurement approach enabling even close-to process applications. Based on several examples we demonstrate the potential of light scattering characterization during the fabrication process up to even in-situ coating inspection.

Source: Springer Link (Chiba Institute of Technology)

DOI: 10.1051/epjconf/202430903023/pdf

Authors: Anne-Sophie Munser, Tobias Herffurth, Marius Wyltschew, Thomas Gischkat, Sven Schröder

Institution: Fraunhofer Institute for Applied Optics and Precision Engineering

Language: English

Topic: Surface Roughness and Optical Measurements

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W6903392540

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