Work

Plasma parameter investigation during plasma-enhanced chemical vapor deposition of silicon-containing diamond-like carbon films

Year: 2025

Type: article

Source: Fraunhofer-Publica (Fraunhofer-Gesellschaft)

DOI: 10.24406/publica-r-234490

Authors: Grotjahn, T., Aslanbas, Ö., Mee, M., König, M., Meier, S.

Language: English

Topic: Diamond and Carbon-based Materials Research

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: green

Funders: Deutsche Forschungsgemeinschaft, Bundesministerium für Bildung und Forschung

Award: G6755243723

OpenAlex ID: W6907582697

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