Work

X-ray diffraction characterization of suspended structures for MEMS applications

Year: 2025

Type: preprint

Abstract: Mechanical stress control is becoming one of the major challenges for the future of micro and nanotechnologies. Micro scanning X-ray diffraction is one of the promising techniques that allows stress characterization in such complex structures at sub micron scales. Two types of MEMS structure have been studied: a bilayer cantilever composed of a gold film deposited on poly-silicon and a boron doped silicon bridge. X-ray diffraction results are discussed in view of numerical simulation experiments.

Source: arXiv (Cornell University)

DOI: 10.48550/arxiv.2501.10424

Authors: Goudeau, P., Tamura, N., Lavelle, B., Rigo, S., Masri, T., Bosseboeuf, A., Sarnet, T., Petit, J. -A., Desmarres, J. -M.

Institutions: Lawrence Berkeley National Laboratory, Centre d’Élaboration de Matériaux et d’Études Structurales, National Engineering School of Tunis, Centre National de la Recherche Scientifique, Centre National d'Études Spatiales

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W6910808137

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