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Computational Lithography Simulation Code and Data for "Direct Nanopatterning of Complex 3D Surfaces and Self-Aligned Superlattices via Molecular-Beam Holographic Lithography"

Year: 2025

Type: article

Abstract: This release contains codes of mbhl package and notebooks for reproducing computational lithography simulations in Nat. Commun. accepted version for manuscript NCOMMS-24-51170 "Direct Nanopatterning of Complex 3D Surfaces and Self-Aligned Superlattices via Molecular-Beam Holographic Lithography".

Source: Zenodo (CERN European Organization for Nuclear Research)

DOI: 10.5281/zenodo.14986964

Author: T.Tian

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W6912041074

FWCI: 0.231

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Cited by: 1

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