Supplementary Information
Year: 2024
Type: supplementary-materials
Abstract: The supplementary material details the microfabrication process for cantilevers and clamped-clamped beams made of hafnium oxide. It explains the setup for measuring the flexoelectric coefficient using a Laser Doppler Vibrometer. Annealing tests are presented to show that different temperature profiles result in the crystallization of HfO2 into its tetragonal phase. Polarization-electric field (P-E) loop measurements confirm the non-ferroelectric nature of HfO2 and provide data to calculate its relative permittivity.
Source: Figshare
Authors: Moreno-Garcia, Daniel, Villanueva, L. Guillermo
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W6940164225
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