Nanoscale InSe/GaTe van der Waals Heterojunction Diodes for Extreme Deep Ultraviolet Detection in Semiconductor Lithography and Inspection
Year: 2025
Type: article
Source: ACS Applied Nano Materials
Institution: Indian Institute of Technology Delhi
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W6940501176
