Finite element and circuit modeling of SiC MEMS multi-turn piezoresistive sensor device for reliable high-pressure sensing in hostile environments
Year: 2025
Type: article
Source: World Journal of Engineering
Authors: Dadasikandar Kanekal, Vaarshini Ravichandran, Priya Shukla, Sumit Kumar Jindal, Suraj Prakash Sahoo
Institution: Vellore Institute of Technology University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W6940943272