Comparative Analysis of SAW Substrate Materials for Unit Resonators
Year: 2024
Type: article
Abstract: — This paper provides an in-depth comparative analysis of different substrate materials for unit resonators in Surface Acoustic Wave (SAW) technology, including Quartz (SiO₂), Lithium Niobate (LiNbO₃), Lithium Tantalate (LiTaO₃), Zinc Oxide (ZnO), Gallium Arsenide (GaAs), Aluminum Nitride (AlN), Lanthanum Gallium Silicate (Langasite, La₃Ga₅SiO₁₄), Potassium Niobate (KNbO₃), Lead Zirconate Titanate (PZT), and Gallium Nitride (GaN). The assessment of these substances considered important factors like their Voigt notation elasticity matrix, piezoelectric coupling matrix, relative permittivity, and density. The suitability for high-efficiency SAW resonators of each substrate was systematically investigated using Rayleigh waves, electric field plots, and resonant frequency measurements. Our results emphasize the pros and cons of each material's mechanical and electrical properties, offering important guidance for choosing the best substrates in SAW device use. This study intends to assist researchers and engineers in making well-informed decisions while designing SAW resonators for different technological uses.
Author: Amith Srivatsa, Vrushank Jagadeesh, Chetlapalli Krishna Shreyanth , Archana H R , Surendra H H , Rajanikanth Kashi N , Bhavana H T , Sunil M A
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W6949623687
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