Supplement Response
Year: 2024
Type: article
Abstract: Supplementary Information: High-quality Temperature-complementary Bulk Acoustic Wave Resonators Fabricated with Strippable Single-crystalline AlN Films Grown on Sapphire
Source: Figshare
Authors: Luo, Tianyou, Zhang, Yinuo, Chen, Zhipeng, Xu, Kaibin, Ouyang, Peidong, Hu, Han, Li, Chenyang, Zhu, Yuhan, Yi, Xinyan, Li, Guoqiang
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W6959312481
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