Work

Calibration-Free, Split Accelerated Degradation Testing Platform Revealing the Long-Term Reliability of 2-D Micromirrors Without On-Chip Sensors

Year: 2025

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2025.3587456

Authors: Ze-Yu Zhou, Kai-Ming Hu, Er-Qi Tu, Heng Zou, Hui-Yue Lin, Fan Yang, Guang Meng, Wen-Ming Zhang

Institutions: Shanghai Jiao Tong University, State Key Laboratory of Mechanical System and Vibration, Ruijin Hospital

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, National Key Research and Development Program of China, Program of Shanghai Academic Research Leader

Awards: G1955373220, G2677904528, G3254222869, G4100315886, G7915745291

OpenAlex ID: W6959685172

FWCI:

Cites: 43

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