Radio Frequency (RF) based process signature of micro-EDM process: Process considerations and involved mechanisms
Year: 2024
Type: conference-paper
Source: Lirias
Authors: Yao, Zequan, Saxena, Krishna Kumar, Volski, Vladimir, Qian, Jun, Vandenbosch, Guy, Reynaerts, Dominiek
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W7052296290
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