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Implementing Machine Learning Techniques for Optimizing Atomic Layer Deposition in Thin Films Growth

Year: 2025

Type: article

Source: DigitalCommons-IMSA (Illinois Mathematics and Science Academy)

Author: Yardi, Yash

Language: English

Topic: Machine Learning in Materials Science

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7056950259

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