Work

Positional Distribution Diagnosis of Argon Inductively Coupled Plasma Based on Tomographic Optical Emission Spectroscopic Measurement and Collisional-Radiative Model

Year: 2025

Type: conference-paper

Abstract: トモグラフィック発光分光計測と衝突輻射モデルにもとづくアルゴン誘導結合プラズマの位置分布診断, Positional Distribution Diagnosis of Argon Inductively Coupled Plasma Based on Tomographic Optical Emission Spectroscopic Measurement and Collisional-Radiative Model

Source: Tokyo Tech Research Repository (Tokyo Institute of Technology)

Authors: 山下雄也, Yuya Yamashita

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W7070890607

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