Work

Morphological evolution of 4H-SiC substrates in stealth dicing by picosecond laser

Year: 2025

Type: article

Source: Journal of Laser Applications

DOI: 10.2351/7.0001860

Authors: Huajian Shi, Wang Zhang, Shanglu Yang, Wenjie Ren, Nan Li, Jicun Lu

Institutions: Shanghai Dianji University, Chinese Academy of Sciences, Shanghai Institute of Optics and Fine Mechanics

Language: English

Topic: Laser Material Processing Techniques

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Natural Science Foundation of Shanghai, National Key Research and Development Program of China

Awards: G1916875186, G1959337514

OpenAlex ID: W7082254151

FWCI: 0.894

Cites: 13

Cited by: 2

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