Investigations of the influence of sputter-deposited thin films on the strength and the fatigue behavior of ultra-thin glass
Year: 2025
Type: dissertation
Abstract: Ultra-thin glass with a thickness of 100 µm or below is a high-end substrate. Its use is currently limited to foldable smartphone displays, fingerprint sensors, and a few other applications. However, glass usage in semiconductor applications is treated as the next big thing. There, the low surface roughness, high thermal stability, and high barrier properties of ultra-thin glass could be advantageous. Unfortunately, the mechanical strength is heavily influenced by any functionalization step, making stability management the main challenge. This thesis clarifies the influence of selected sputter-deposited thin film coatings on the strength and the fatigue behavior of ultra-thin glass. A new rapid fatigue test was developed and used to investigate the influence of sputter-deposited coatings under cyclic loading. Correlations between key film properties and glass strength were then further examined under quasi-static conditions.
DOI: 10.22032/dbt.67102
Author: Langgemach, Wiebke
Language: English
Subfield: Ceramics and Composites
Field: Materials Science
Domain: Physical Sciences
Open Access status: gold
OpenAlex ID: W7082280615
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