Work

Impact of focused ion beam-induced damage on micromechanical properties in Hematite

Year: 2025

Type: article

Abstract: Focused ion beam (FIB) milling is a common technique for microscale fabrication, however, this method is also known to alter the surface defect properties, affecting mechanical deformation response. This study investigates the effects of Ga+ and Xe+ sources on the mechanical response of ‘near dislocation free’ Hematite α-Fe2O3 single crystals using micropillar compression with samples oriented along [0001], [0-110], and [5-502] compression axes. Although the extent of difference in mechanical properties between Ga+ and Xe+ FIB varied across crystallographic compression directions, the critical resolved shear stress (CRSS) measured in Xe+ FIB was consistently higher. This marked difference in CRSS was attributed to microstructural differences and higher interaction volume in Ga+ compared to Xe+ FIB. The anisotropic response of the ion beam damage on CRSS has also been reported.

Source: Scripta Materialia

DOI: 10.1016/j.scriptamat.2025.117000

Authors: Shreehard Sahu, Vivek Devulapalli, Saba Saood, Gerhard Dehm, James P. Best

Institution: Max-Planck-Institut für Nachhaltige Materialien

Language: English

Topic: Microstructure and mechanical properties

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: hybrid

Estimated APC paid: $3,220

Funder: KSB Stiftung