Work

Nonlinear Dynamics of Capacitively Coupled Plasma Excited by Tailored Voltage Waveform

Year: 2025

Type: article

Source: IEEE Transactions on Plasma Science

DOI: 10.1109/tps.2025.3611452

Authors: Ming-Liang Zhao, Zhou Yang, Kai Zhao, Yu-Ru Zhang, Fei Gao, You-Nian Wang

Institutions: Dalian University of Technology, Key Laboratory of Materials Modification by Laser, Ion and Electron Beams

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Fundamental Research Funds for the Central Universities

Awards: G4998678129, 面向工业等离子体源的一些关键科学问题的研究, G6028187380, G8210280333, G978725065

OpenAlex ID: W7083314481

FWCI: 0.227

Cites: 38

Cited by: 1

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