Microscope for investigating the size of an EUV radiation source emitting at 11.2 nm
Year: 2025
Type: article
Authors: A A Perekalov, N I Chkhalo, V E Guseva, I V Malyshev, A N Nechay, A E Pestov, D G Reunov, R M Smertin, M N Toropov, N N Tsybin
Language: English
Subfield: Radiation
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
Awards: G405006092, G5348181454
OpenAlex ID: W7083672783