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Physics-Informed Neural Network-Based Prediction of V/G Value in Czochralski Silicon Single Crystal Growth Process

Year: 2025

Type: conference-paper

Source: Youth Academic Annual Conference of Chinese Association of Automation (YAC)

DOI: 10.1109/yac66630.2025.11149781

Authors: Yin Wan, Jia-Wen Zhang, Ding Liu, Jun-Chao Ren

Institution: Xi'an University of Technology

Language: English

Topic: Model Reduction and Neural Networks

Subfield: Statistical and Nonlinear Physics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

OpenAlex ID: W7084051854

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Cites: 10

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