Work

Data-driven robust adaptive control based on multi-step error feedback for silicon single crystal diameter control in Czochralski process

Year: 2025

Type: conference-paper

Source: Youth Academic Annual Conference of Chinese Association of Automation (YAC)

DOI: 10.1109/yac66630.2025.11150074

Authors: Jun-Chao Ren, Ding Liu, Yin Wan

Institution: Xi'an University of Technology

Language: English

Topic: Adaptive Control of Nonlinear Systems

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

OpenAlex ID: W7084054953

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Cites: 17

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