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Range-Aware Deep Learning Framework for Multi-Parameter Electrical Test Prediction in Semiconductor Manufacturing

Year: 2025

Type: conference-paper

Source: 2022 IEEE 18th International Conference on Automation Science and Engineering (CASE)

DOI: 10.1109/case58245.2025.11164069

Authors: Jihyun Kim, Sunhyeok Hwang, Jinyong Jeong, Jaehoon Jeong, Kyu-Baik Chang, Hanlim Choi, Suyeon Shon, Seoung Bum Kim

Institutions: Korea University, Samsung (South Korea), Samsung Electronics (South Korea)

Language: English

Topic: Fault Detection and Control Systems

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

Funders: National Research Foundation, Samsung

OpenAlex ID: W7084135506

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