SOI MEMS resonators with electrical driving and readout for uncooled terahertz sensing applications
Year: 2025
Type: conference-paper
Authors: Ya Zhang, Ryotaro Takuechi, Qian Liu, Zihao Zhao, Isao Morohashi, Kazuhiko Hirakawa
Institution: Tokyo University of Agriculture and Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W7085647617
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