Work

Heat Transfer and Actuation Performance of Multi-Array V-Shaped MEMS Electrothermal Actuators in Air

Year: 2025

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2025.3618898

Authors: Xiaoyi Gu, Yun Cao, Haipeng Xie, Xiaoyu Kong, Hengbo Zhu, Zhanwen Xi

Institution: Nanjing University of Science and Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: G8839084612

OpenAlex ID: W7091545679

FWCI:

Cites: 22

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