A Fully Depleted 52 μm GS CIS Pixel with 6 ns Charge Transfer, rms Read Noise, 80 μV/e- CG and >80 % VIS-QE
Year: 2025
Type: conference-paper
Abstract: Imec is developing a CMOS compatible image sensors. Full depletion allows enhancement of the charge collection speed in photodetectors. A 48x48 pixel test array with 52 μm pitch has been developed in this technology. An initial evaluation is presented in this paper. The device achieves 7 e-rms read noise at 80 μV/e- conversion gain. The mean charge transfer time is estimated to 6 ns. QE in the visible is expected to be >80 %.
Source: IISS online library
DOI: 10.60928/atn9-tpr8
Authors: Andreas Süss, Linkun Wu, Jean-Luc Bacq, Annachiara Spagnolo, Philippe Coppejans, Vasyl Motsnyi, Luc Haspeslagh, Jonathan Borremans, Maarten Rosmeulen
Institutions: IMEC, Vrije Universiteit Brussel
Language: English
Topic: CCD and CMOS Imaging Sensors
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W7093364348
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