Work

Analysis of polishing errors from subaperture tools

Year: 2009
Type: article
Abstract: The polishing process of aspheric or freeform surfaces is normally implemented as a subaperture process with controlled movement of the tool. The use of different tools and controlling mechanisms may introduce errors. The errors related to the shape and the size of the tools and the influence of optimization algorithms is compared by using the 'Power Spectral Density ' (PSD). 1
Language: English
Open Access status: green
OpenAlex ID: W95566240
FWCI:
Cites: 2
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Related to: 10