Work

Integration of micro-fabricated thermal flow rate sensors in a 4H-SiC substrate passivated by a MPECVD-grown diamond layer

Year: 2024

Type: conference-paper

Source: HAL (Le Centre pour la Communication Scientifique Directe)

Authors: Vuillermet, Enora, Rousseau, Lionel, Hamaoui, Georges, Ben Moussa, Nizar, Nefzaoui, E., Lazar, Mihai

Institutions: Light, nanomaterials, nanotechnologies, Laboratoire d'électronique, systèmes de communication et microsystèmes

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7106600046

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