Deformation of a MEMS Transducer Membrane with a Deposited Stressed Layer
Year: 2025
Type: article
Source: Russian Microelectronics
Authors: V. V. Amelichev, S. S. Generalov, I. V. Godovitsyn, S. A. Polomoshnov, M. A. Saurov
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W7106794588