Machining of Silicon Carbide Plates with a Bonded Diamond Tool
Year: 2025
Type: article
Source: Russian Microelectronics
Authors: V. S. Kondratenko, A. A. Isaev, V. V. Kadomkin, G. M. Biryukov, I. I. Borodynkin, A. D. Tambovskii
Institution: MIREA - Russian Technological University
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W7106808200