Work

3D Scatterometry on arbitrary STL formatted shape

Year: 2025

Type: conference-paper

Abstract: International audience

Source: HAL (Le Centre pour la Communication Scientifique Directe)

Authors: Soulan, Sebastien, Grasland, Justine, Le Cunff, Delphine, Besacier, Maxime, Tortai, Jean-Herve

Institutions: Laboratoire des Technologies de la Microélectronique, Laboratoire d'Électronique des Technologies de l'Information, STMicroelectronics (France)

Language: English

Topic: Surface Roughness and Optical Measurements

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W7108000376

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