Work

PECVD of SiON optical thin films and nano-laminates

Year: 2025

Type: conference-paper

Abstract: International audience

Source: HAL (Le Centre pour la Communication Scientifique Directe)

Authors: Dubreuil, Pascal, Monmayrant, Antoine, Gauthier-Lafaye, Olivier, Calvez, Stéphane

Institution: Laboratoire d'Analyse et d'Architecture des Systèmes

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W7108518010

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