Compact high-precision heterodyne interferometer with equal optical path and common light path quadruple doppler shifts
Year: 2025
Type: article
Abstract: Laser displacement measurement system are extensively utilized in ultra-precision five-axis linkage machines for nanometer-scale displacement control and in high-end lithography machine for sub-nanometer high-speed workpiece stage positioning. However, the current laser displacement measurement system has a limitation, that is, the real-time displacement measurement accuracy is limited to the optical subdivision multiple and the mirror group size, which makes it difficult for compact measurement accuracy to reach the sub-nanometer level. Based on this, we propose a compact high-precision heterodyne interferometer with equal optical path and common light path quadruple doppler shifts, which achieves high-precision displacement measurement with eight times optical subdivision accuracy by four doppler frequency shifts. The results show that the theoretical resolution of the 110×85×50 mm3 laser displacement measurement device is better than 0.077 nm, the linear displacement measuring error at 200 μm is better than ± 5 nm, and the actual step measuring error of 10 nm is better than ±1 nm. Therefore, the laser displacement measurement device has the measurement potential of high stability, high measurement accuracy and high reliability in the field of high-end equipment.
Source: Optics and Lasers in Engineering
Authors: Yunfei Yin, Xihan Sun, Yong Liu, Shasha Yin, Jianke Zhao, Zhen Ma, Bo Geng, Wei Liu, Zhaohui Li
Language: English
Subfield: Mechanical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
Estimated APC paid: $4,020
Awards: G2282433763, G4987860238, G5375262696
OpenAlex ID: W7109626916