Nanofabrication of monolithically integrated multilayer metasurfaces via fully CMOS-compatible processes
Year: 2025
Type: conference-paper
Authors: Ye, Yuntian, Peng, Hao, Yin, Shengqi, Yan, Jize, Kiang, Kian Shen, Fang, Xu
Language: English
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W7112053268
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