Work

Field measurement analyses and improvement simulation of airflow parallelism in a wafer-griding cleanroom

Year: 2025

Type: article

Source: Springer Link (Chiba Institute of Technology)

DOI: 10.1051/e3sconf/202567202015/pdf

Authors: Indra Permana, Alya Penta Agharid, Fujen Wang

Language: English

Topic: Aerosol Filtration and Electrostatic Precipitation

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7113906378

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