Effects of oxygen thermal annealing on AlN trench metal-semiconductor field-effect transistors (MESFETs) on single-crystal AlN substrates
Year: 2025
Type: article
Source: Applied Physics Letters
DOI: 10.1063/5.0304969
Authors: Bingcheng Da, Dinusha Herath Mudiyanselage, Dawei Wang, Junzhe Xie, Xianzhi Wei, Houqiang Fu
Institutions: Arizona State University, Texas State University
Language: English
Subfield: Condensed Matter Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W7114775265
