Work

Elementary Chemical Reactions on the SiO2 Surface in Fluorocarbon Plasma

Year: 2025

Type: article

Source: Plasma Physics Reports

DOI: 10.1134/s1063780x25603748

Authors: I. I. Ziganshin, D. V. Lopaev, A. T. Rakhimov

Institutions: Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7116629451

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Cites: 34

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