Thermal conductivity-based gas sensing utilizing multi-threshold MEMS switches: Helium as a case study
Year: 2025
Type: article
Source: Applied Physics Letters
DOI: 10.1063/5.0305179
Authors: Hasan Albatayneh, Mohammad I. Younis
Institution: Binghamton University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W7116737751