Wafer-Scale Integration of Lithium Niobate on a Silicon Photonics 200-mm Platform
Year: 2025
Type: conference-paper
Abstract: We demonstrate a scalable approach for integrating lithium niobate onto silicon photonics using wafer-scale micro-transfer printing, enabling high-speed modulators with a 3.8 V half-wave voltage and over 70 GHz bandwidth. As proof of concept, over 200 lithium niobate structures were integrated on a$\mathbf{2 0 0}-\text{mm}$wafer.
Source: IEEE Photonics Conference
Authors: Margot Niels, Ewoud Vissers, Tom Vanackere, Arno Moerman, Xiujun Zheng, Xin Guo, Peter Geerinck, Emadreza Soltanian, Jing Zhang, Sofie Janssen, Peter Verheyen, Neha Singh, Dieter Bode, Martin Davi, Filippo Ferraro, Philippe Absil, Sadhishkumar Balakrishnan, Joris Van Campenhout, Sebastian Hänsch, Hanh Mai, Nishant Singh, Günther Roelkens, Sarah Uvin, Maximilien Billet, Bart Kuyken
Institutions: Ghent University, IMEC
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W7116779512