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Laser-Induced Forward Transfer of Thin Microchiplets in Quasi-Contact Mode

Year: 2025

Type: conference-paper

Source: IEEE CPMT Symposium Japan (ICSJ)

DOI: 10.1109/icsj66986.2025.11302621

Authors: Harindra Kumar Kannojia, Geert Van Steenberge

Institutions: Ghent University, IMEC

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7116898995

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Cites: 7

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