Work

Uniform lanthanum oxide atomic layer deposition using ozone

Year: 2025

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/6.0005037

Authors: Denis Olkhovskii, Ilya Ezhov, Pavel Vishniakov, Denis Nazarov, Maxim Maximov

Institutions: Peter the Great St. Petersburg Polytechnic University, St Petersburg University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Russian Science Foundation

Award: G8183796733

OpenAlex ID: W7117112809

FWCI:

Cites: 60

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