Work

Performance Evaluation Methodology for Patterned Micro-Heaters Used in Gas Sensor Applications

Year: 2025

Type: article

Abstract: Hazardous gas detection requires portable, low-power sensors with high sensitivity, where micro-heater design is critical for semiconductor metal oxide (SMO) sensors. This study presents a standardized evaluation framework for quantitatively comparing patterned micro-heaters under equal-power conditions, ensuring objective comparison across geometries. Two key metrics—power efficiency and temperature uniformity—were defined, normalized, and integrated into a single optimal score through weighted summation. The framework was validated through coupled electro-thermal simulations and experiments on six geometries, including spiral and meander patterns. Results demonstrated that the framework enables accurate identification of designs combining low power consumption with high temperature uniformity. Notably, the meander-based design showed superior efficiency and uniformity, demonstrating its suitability for practical applications. This framework thus offers a rational tool for micro-heater design, supporting the development of reliable, energy-efficient devices for portable and Internet of Things (IoT) applications.

Source: Applied Sciences

DOI: 10.3390/app16010178

Authors: Jiyoung Yoon, Yuntae Ha, Juhye Kim, Dong Geon Jung, Jinhyoung Park

Institutions: Korea Institute of Industrial Technology, Korea University of Technology and Education

Language: English

Topic: Gas Sensing Nanomaterials and Sensors

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Affordable and clean energy

Open Access status: gold

Estimated APC paid: $2,896