Work

Efficient geometric modeling and joint calibration for biaxial MEMS-based fringe projection profilometry

Year: 2025

Type: article

Abstract: Fringe projection profilometry (FPP) enables high-precision 3D shape measurement and is increasingly deployed with biaxial micro-electro-mechanical system (MEMS) laser-scanning projectors for large-range projection. However, the fast and slow axes of a biaxial MEMS mirror exhibit coupled and nonlinear motion, causing the actual scanning trajectory to deviate from an ideal separable sweep. Consequently, points sharing the same phase no longer lie on straight lines or planar isophase surfaces, but instead follow curved spatial loci, making accurate calibration challenging. This work introduces a phase-angle-ray model (PARM) that establishes a bivariate polynomial mapping between the phase and MEMS deflection angles, from which projected rays are analytically derived. Two calibration frameworks based on pinhole and ray-based imaging models are developed by integrating geometric constraints from a standard plane and multiple standard spheres. Experiments demonstrate that the proposed method achieves high calibration accuracy, improved metric consistency, and precise 3D reconstruction.

Source: Optics Express

DOI: 10.1364/oe.585339

Authors: Yupei Miao, Ziwei Wang, Xiaojie Zhang, Qijian Tang, Xiaoli Liu

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $2,270

Funders: National Natural Science Foundation of China, Shenzhen Fundamental Research Program, National Key Research and Development Program of China

Awards: G2452215779, G4069111457, G4916610499, G8181742241