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Epi‐Illumination Spatio‐Temporal Scanning Interference Microscopy for 3D Topography Measurement With an Unlimited Field‐of‐View

Year: 2025
Type: article
Abstract: ABSTRACT The limited field of view (FoV) of conventional interferometric imaging techniques is hard‐pressed to meet the demand for high‐throughput characterization of large‐scale micro‐ and nanostructures. To mitigate these challenges, we developed an epi‐illumination spatio‐temporal scanning interference microscope (epi‐STSIM) with an extended FoV along the scanning direction, which avoids the trade‐off between the resolution and FoV. The recorded interferograms of epi‐STSIM are processed by the proposed non‐iterative generalized phase‐shifting algorithm (PSA) combined with Lissajous ellipse fitting and least‐squares sine fitting (LEF&LSF). We demonstrate the resistance to environmental vibration and straightness error, and the height measurement accuracy comparable to vertical scanning white light interferometry (WLI). The measurement results of a microlens array and an etched nanostructure verify the feasibility of large‐scale micro‐ and nanostructure topography measurement.
DOI: 10.1002/lpor.202502509
Authors: Hang Zhao, Zedi Li, Qizhe Wu, Jian Wang, Hui Deng, Shiyuan Liu, Jinlong Zhu
Language: English
Open Access status: bronze
Funders: National Natural Science Foundation of China, Hubei University of Technology, Huazhong University of Science and Technology, Hubei University, Shenzhen Fundamental Research Program, National Key Research and Development Program of China
OpenAlex ID: W7117315873
FWCI: 0.749
Cites: 43
Cited by: 2
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