Work

Inductively Coupled Plasma Etching of ITO Nanophotonic Structures for Visible Wavelengths

Year: 2025

Type: article

Source: ACS Applied Nano Materials

DOI: 10.1021/acsanm.5c05036

Authors: Bolin Zhou, Xinrui Wang, Yuzhen Zheng, Xiaoqi Yu, Junfei Wang, Zhiwei Sun, Tong Xu, Suman Xia, Yongchen Miao, Pengyan Wen, Kanglin Xiong, Jianping Liu, Xinhe Zheng, Huai-Bing Wang, Hui Yang

Institutions: University of Science and Technology Beijing, Chinese Academy of Sciences, Suzhou Institute of Nano-tech and Nano-bionics

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science and Technology Major Project, Basic Research Program of Jiangsu Province

Awards: G3796259209, G7112575299

OpenAlex ID: W7117360905

FWCI:

Cites: 44

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