Work

Synthesis of CeO 2 Composite Particles for Chemical Mechanical Polishing of Single-Crystal SiC Substrates and Their Polishing Applications: A Review

Year: 2026

Type: article

Source: ACS Applied Materials & Interfaces

DOI: 10.1021/acsami.5c24152

Authors: Xin Chen, Jisheng Pan, Hang Zhang, Yongle Liu

Institution: Guangdong University of Technology

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Key Research and Development Program of China, Science and Technology Planning Project of Guangdong Province

Awards: G2432544748, G4264146304

OpenAlex ID: W7123341386

FWCI: 13.84

Cites: 122

Cited by: 8

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