Ultra-Low-Loss PECVD SiN Photonic Platforms at Telecom Wavelengths: Comparison Between Modeling and Experimental Results
Year: 2026
Type: article
Source: Journal of Lightwave Technology
Institutions: Institut polytechnique de Grenoble, Centre National de la Recherche Scientifique, Commissariat à l'Énergie Atomique et aux Énergies Alternatives, CEA Grenoble, Laboratoire des Technologies de la Microélectronique, Université Grenoble Alpes, Laboratoire d'Électronique des Technologies de l'Information
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Agence Nationale de la Recherche
Award: NANOELEC
OpenAlex ID: W7123359836
