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A Miniature Electrostatic Actuator with Enhanced Contact Force for a Resistive MEMS Switch

Year: 2025

Type: article

Source: Russian Microelectronics

DOI: 10.1134/s1063739725600864

Authors: I. V. Uvarov, I. A. Belozerov

Institutions: Yaroslavl State University, Kurchatov Institute, Institute of Physics and Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7123679981

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Cites: 36

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