Work

Simulation of Plasma-Chemical Processes in Ar/CF4 Mixture in a Short Low-Pressure Glow Discharge

Year: 2025

Type: article

Source: High Energy Chemistry

DOI: 10.1134/s0018143925700754

Authors: A. I. Saifutdinov, V. A. Purin

Institution: Kazan State Technical University named after A. N. Tupolev

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7123756015

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Cites: 34

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