214 MW/cm2 vertical β -Ga2O3 UMOSFETs enabled by HF sidewall treatment
Year: 2026
Type: article
Source: Applied Physics Letters
DOI: 10.1063/5.0310882
Language: English
Topic: Ga2O3 and related materials
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
Award: G6015310717
OpenAlex ID: W7123963809
