Langasite (LGS) Surface Acoustic Wave (SAW) Pressure Sensor with Kovar Alloy Point-Force Packaging for High-Temperature Environments
Year: 2026
Type: article
Abstract: Langasite (LGS)-based surface acoustic wave (SAW) sensors are promising for high-temperature pressure detection. However, their performance is limited by the low pressure sensitivity of conventional sealed-cavity packaging and temperature-induced measurement drift. To address these issues, this study introduces a novel LGS SAW pressure sensor featuring two key innovations: a Kovar alloy point-force packaging structure to amplify pressure-induced LGS substrate deformation, enhancing sensitivity compared to traditional designs, and SAW resonators fabricated on an LGS (0°, 138.5°, 26.7°) cut, selected based on electromechanical simulations for its superior intrinsic pressure sensitivity and monotonic frequency-temperature response, effectively mitigating temperature interference on pressure measurements. Experimental characterizations show the resonator achieves a high Q-value of ~3000 at ~357 MHz. Tested under conditions of 250 °C and 0-0.4 MPa, the sensor exhibits a pressure sensitivity of 0.1866 MHz/MPa with a relative error of only 4.8% versus the finite element method (FEM)-simulated 0.196 MHz/MPa, demonstrating the proposed design's effectiveness for accurate, stable pressure monitoring in harsh high-temperature environments such as turbine engines and high-temperature manufacturing lines.
Source: Sensors
DOI: 10.3390/s26020567
Institutions: Shenzhen University, Nuclear Power Institute of China
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $3,137
OpenAlex ID: W7124166202
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