Work

Simultaneous Charge Carrier Density Mapping of SiC Epilayers and Substrates with Terahertz TDS

Year: 2025

Type: conference-paper

Source: International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)

DOI: 10.1109/irmmw-thz61557.2025.11320131

Authors: Joshua Hennig, Jens Klier, Stefan Duran, Kuei-Shen Hsu, Jan Beyer, Christian Röder, Franziska Beyer, Nadine Schüler, Nico Vieweg, Katja Dutzi, Georg von Freymann, Daniel Molter

Institutions: Fraunhofer Institute for Industrial Mathematics, TU Bergakademie Freiberg, Fraunhofer Institute for Integrated Systems and Device Technology, Toptica Photonics (Germany)

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7124176657

FWCI:

Cites: 6

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